单项选择题
A.Cleaning->Gate Depo->Photo->WET EtchB.Cleaning->Gate ……
在Gate Step中,得到Gate Pattern的顺序是()
A.Cleaning->Gate Depo->Photo->WET Etch
B.Cleaning->Gate Depo->Photo->DRY Etch
C.Gate Depo->Cleaning->Photo->WET Etch
D.Cleaning->Photo->Gate Depo->WET Etch