A.照明光学系 B.投影光学系 C.MASK STAGE D.除震系统
单项选择题在Gate Step中,得到Gate Pattern的顺序是()
A.Cleaning->Gate Depo->Photo->WET Etch B.Cleaning->Gate Depo->Photo->DRY Etch C.Gate Depo->Cleaning->Photo->WET Etch D.Cleaning->Photo->Gate Depo->WET Etch
单项选择题PHOTO设备中VCD的作用是()
A.涂布光刻胶 B.清洗glass基板 C.加热干燥,去除光刻胶里面的solvent D.真空干燥,去除光刻胶里面的solvent
单项选择题PHOTO工程最主要的三个Process是()
A.Clean,Coating,Develop B.Depo,PHOTO,WET Etch C.Coating,Exposure,Develop D.Exposure,Develop,IR Oven
单项选择题下面哪一个不属于PHOTO Cleaner的构成()
A.In Conveyer B.E-UV C.AA-JET D.AIR Knife
单项选择题下列不属于PHOTO工程的设备是()
A.Micro Scope B.Cleaner C.SBK D.Develop